| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To accurately acquire information about a position irradiated with a laser beam in X and Y directions and Z direction without moving a laser head. <P>SOLUTION: A laser beam is emitted from a laser head 22 fixed at a predetermined position to a plurality of points on the same surface of a resin plate 30A to acquire information about positions irradiated with the laser beam in X and Y directions. Then, a laser beam is emitted from the laser head 22 to a plurality of points on the same surfaces of resin plates 30B, 30C with the height thereof changed twice to acquire information about positions irradiated with the laser beam in X and Y directions, as well as information about positions irradiated with the laser beam in Z direction of different heights. The laser beam is focused by minutely adjusting the position of the laser head 22 in the Z direction based on the acquired information about positions irradiated with a laser beam in the Z direction. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
