| 摘要 |
PURPOSE: A device for the density distribution equalizing of an acceleration ion beam and a method thereof are provided to reduce an acceleration ion beam emission time by using a chi-square fitting program. CONSTITUTION: A motion stage (100) moves vertically and horizontally. An acceleration ion beam emitting unit (120) emits an acceleration ion beam to the motion stage. A stage control unit (140) uses a chi-square fitting program. The stage control unit calculates spot emission time of each motion stage. The stage control unit controls vertical and horizontal movements of the motion stage. [Reference numerals] (100) Motion stage; (120) Acceleration ion beam emitting unit; (140) Stage control unit |
