| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for working a workpiece having excellent temporary adhesion properties upon temporary fixation, heat resistance, solvent resistance, resist developer resistance and acid resistance, and having excellent peelability and detergency upon releasing of temporary fixation. <P>SOLUTION: The method for working the workpiece includes a step (a) of temporarily fixing the workpiece onto a supporting base material by using an adhesive; a step (b) of working the temporarily fixed workpiece; and a step (c) of peeling the worked workpiece from the supporting base material by using a releasing agent, wherein an adhesive containing an ionomer is used as the adhesive in the step (a) and an acid is used as the releasing agent in the step (c). <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
