| 摘要 |
The present invention relates to a system for reporting and controlling the status of a semiconductor facility apparatus. The system according to an embodiment of the present invention includes: a host controller; a facility controller; and a VID generator. The host controller generates a request by including the SVID list information in a message defined in the semiconductor equipment communication standards (SECS) to acquire the status information of an input/output (I/O) signal of a specific semiconductor facility apparatus and receives the SVID list information as a response for the request through the response message to check the current status of the specific I/O signal. |
