发明名称 液晶表示装置および液晶表示装置の製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To reduce manufacturing cost of a liquid crystal display device. <P>SOLUTION: In a liquid crystal display device including a field effect thin film transistor: a transparent amorphous oxide semiconductor including indium as a material is used for a semiconductor layer of the thin film transistor; the semiconductor layer is formed into a shape including a source electrode, a drain electrode, and a region necessary for electrode lines of the source and drain electrodes; a metal thin film including indium is used for a source/drain layer stacked on the semiconductor layer; an insulating film made of silicon nitride is used for an insulating layer stacked on the source/drain layer; and a channel portion of the thin film transistor is formed by an opening provided in the insulating layer and the source/drain layer. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5610855(B2) 申请公布日期 2014.10.22
申请号 JP20100128564 申请日期 2010.06.04
申请人 发明人
分类号 H01L29/786;G02F1/1368;H01L21/28;H01L21/336;H01L29/417 主分类号 H01L29/786
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