| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device, method and program for accurately as well as efficiently, and automatically measuring a minute displacement at a predetermined position. <P>SOLUTION: The device for measuring displacement includes a photographing section for photographing an image for displacement measurement, including a lattice for displacement measurement disposed at the predetermined position; a lattice region detection section for detecting a lattice region from the image for displacement measurement and extracting an image in the lattice region; a phase distribution deriving section for deriving the phase distribution of moires to the image in the lattice region by a sampling moire method to the extracted image in the lattice region; and a displacement determination section for determining the displacement, at a predetermined position, based on the phase difference between before and after the displacement at the predetermined position determined from the phase distribution and based on a predetermined lattice pitch. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
