MULTILAYER ELECTRONIC STRUCTURE WITH STEPPED HOLES

摘要

The present invention relates to a multilayer electronic structure which comprises multiple layers extended from an X-Y plane; a dielectric enclosing a metal via post conducting electricity in a Z direction vertical to the X-Y plane; and one or more multilayer holes crossing two or more multiple layers. Two or more holes are included in an adjacent layer of the multilayer electronic structure and have different sizes on the X-Y plane. The adjacent part of the holes in the adjacent layer has a step shape, and one or more hole layers are on the surface of the multilayer electronic structure.