| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide equipment for measuring a position which enables accurate measurement of positional information on a moving body. <P>SOLUTION: The position measuring equipment measures the positional information on the moving body which moves within a plane of movement. The equipment has a light source which radiates light onto a movable grating disposed on a first surface of the moving body, a fixed optical member which is fixed in the positional relation with the light source and has a second surface whereon the light diffracted by the movable grating is incident, and which diffracts or reflects the incident light and returns it to the movable grating, and a detecting device which detects the light interfered again through the intermediary of the movable grating. The first and second surfaces are almost parallel with each other. <P>COPYRIGHT: (C)2010,JPO&INPIT |
