发明名称 半導体装置の製造方法
摘要 <p>An optical component is fixed precisely on a sensor chip. After a sensor chip including a front surface having a sensor plane with a plurality of light receiving elements is mounted face-up over a wiring substrate, an adhesive is disposed on the front surface of the sensor chip at a plurality of positions, and a plurality of spacers having adherence is formed by curing this adhesive. Then, an adhesive paste is disposed on the front surface of the sensor chip. Then, an optical component held by a bonding tool is disposed on the front surface via the spacer and the adhesive. After that, the bonding tool is separated from the optical component and the optical component is fixed by curing the adhesive in a state in which a load is not applied to the optical component.</p>
申请公布号 JP5611862(B2) 申请公布日期 2014.10.22
申请号 JP20110047064 申请日期 2011.03.04
申请人 发明人
分类号 H01L27/14;H01L21/56;H01L23/02 主分类号 H01L27/14
代理机构 代理人
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