SURFACTANTS OF SULFATE AND PHOSPHATE-BASED PERFLUORINATED ALKYL ESTERS AND CHROMIUM ETCHANT AND LOW TEMPERATURE PROCESS SOAPING AGENT COMPRISING THE SAME

摘要

Disclosed are anionic surfactants which are a phosphate ester and sulfate ester based material of perfluorinated alkyl, and a method for manufacturing the same. The anionic surfactants can be dispersed in various forms by controlling solid phase or liquid phase, hydrophilic properties, and lipophilic properties. According to the present invention, the anionic surfactants can be used as surfactants of chromium etchants, a semiconductor detergent, and a low temperature soaping agent.