发明名称 GAS PURIFIER
摘要 <p>The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.</p>
申请公布号 KR20140123581(A) 申请公布日期 2014.10.22
申请号 KR20147025171 申请日期 2013.02.08
申请人 ENTEGRIS, INC. 发明人 SRIVASTAVA ABNEESH;GAFFNEY THOMAS RICHARD;COOK JOSHUA T.;SHOGREN PETER K.;MURPHY DAIMHIN PAUL;PEREIRA STENIO DA COSTA
分类号 B01D53/04;B01D53/46;B01D53/86;B01J20/18;C01B21/04 主分类号 B01D53/04
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