| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce an effect of a normal surface condition of an object and accurately detect foreign substances and defects existing on the surface. <P>SOLUTION: A surface inspection apparatus inspects an object 6 having a curved surface. The apparatus comprises first illumination means 9, 10 for illuminating a first area 11 of the surface from a direction at a first angleθ1 in a tangential direction T1 of the first area, second illumination means 7, 8 for illuminating a second area 12 of the surface from a direction at a second angleθ2, which is smaller than the first angle, in a tangential direction T2 of the second area, and imaging means 4 for imaging the first and second areas respectively illuminated by the first and second illumination means from a direction, which is a normal line direction of the first area, tilted to a normal line direction of the second area. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
