发明名称 SNIFFER LEAK DETECTOR
摘要 <p>A sniffing leak detector which comprises a mass spectrometer, a turbomolecular pump and a forevacuum pump. In case that the sniffing hose with the hand-operated sniffing probe becomes detached from the main device, atmospheric pressure would pass into the gas inlet conduit and disrupt the high vacuum in the mass spectrometer. In order to protect the mass spectrometer and the vacuum pump apparatus, a flow restrictor with an upstream filter is arranged in the gas inlet conduit.</p>
申请公布号 EP2092290(B1) 申请公布日期 2014.10.22
申请号 EP20070821891 申请日期 2007.10.26
申请人 INFICON GMBH 发明人 WETZIG, DANIEL
分类号 G01M3/20 主分类号 G01M3/20
代理机构 代理人
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