发明名称 有機薄膜半導体装置及びその製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an organic thin film semiconductor device capable of simplifying a manufacturing process, while simultaneously realizing high mobility, low contact resistance, low threshold voltage and low sub-threshold value, and a method for manufacturing the same. <P>SOLUTION: The organic thin film semiconductor device is a bottom contact type, an electrode end having a tapered slope which is widened from the organic semiconductor side to an insulating layer side, is formed adjacent to at least the insulating layer among sides of the electrode, the rising angle represented by the inclination of slope with respect to a layer direction of the insulating layer of the electrode end, is less than or equal to allowable growth angleθ<SB POS="POST">max</SB>°of the organic molecule forming the organic semiconductor layer defined by the following formula (1):θ<SB POS="POST">max</SB>=tan<SP POS="POST">-1</SP>(e/d) (the formula (1)), d represents a thickness of a crystal grain of the organic molecule, e represents a thickness of single layer of the organic molecule. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5610387(B2) 申请公布日期 2014.10.22
申请号 JP20100195270 申请日期 2010.09.01
申请人 发明人
分类号 H01L29/786;H01L21/336;H01L51/05;H01L51/30;H01L51/40 主分类号 H01L29/786
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