| 摘要 |
<p>The micromechanical element has a substrate (1) with a front side (V) and a rear side (R), which has a spanned cavity (10) on the front side of a diaphragm (M). An electrode structure (7a) is provided on the diaphragm, which has a top side (O) and a lower surface (U). Another electrode structure (7b,7c) is laterally transferred to the diaphragm. The shift of former electrode structure in relation to latter electrode structure causes a deflection of the diaphragm perpendicularly to the level of the two electrode structures, which lead to a change of capacity between both electrode structures. An independent claim is included for a method for manufacturing micromechanical element.</p> |
