发明名称 |
LASER INDUCED THERMAL IMAGING DEVICE AND LASER INDUCED THERMAL IMAGING MTEHOD |
摘要 |
<p>A laser induced thermal transferring device and a laser induced thermal transferring method using the same are provided. The laser induced thermal transferring device comprises: a substrate stage in which a substrate and a donor film are mounted; a beam irradiation portion for irradiating a donor film with a laser beam and transferring a transfer layer of the donor film to a pixel region on the substrate; an error measurement unit for measuring a pattern error by checking the position of the laser beam from the waste donor film separated from the substrate and the position of the pixel region; and a stage moving unit for moving the substrate stage by the displacement corresponding to the pattern error to correct the pattern error.</p> |
申请公布号 |
KR20140123365(A) |
申请公布日期 |
2014.10.22 |
申请号 |
KR20130040652 |
申请日期 |
2013.04.12 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
JEUN, JIN HONG;LEE, YU NA |
分类号 |
H01L51/56;B41J2/455;B41M5/00;H01S3/00 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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