发明名称 LASER INDUCED THERMAL IMAGING DEVICE AND LASER INDUCED THERMAL IMAGING MTEHOD
摘要 <p>A laser induced thermal transferring device and a laser induced thermal transferring method using the same are provided. The laser induced thermal transferring device comprises: a substrate stage in which a substrate and a donor film are mounted; a beam irradiation portion for irradiating a donor film with a laser beam and transferring a transfer layer of the donor film to a pixel region on the substrate; an error measurement unit for measuring a pattern error by checking the position of the laser beam from the waste donor film separated from the substrate and the position of the pixel region; and a stage moving unit for moving the substrate stage by the displacement corresponding to the pattern error to correct the pattern error.</p>
申请公布号 KR20140123365(A) 申请公布日期 2014.10.22
申请号 KR20130040652 申请日期 2013.04.12
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 JEUN, JIN HONG;LEE, YU NA
分类号 H01L51/56;B41J2/455;B41M5/00;H01S3/00 主分类号 H01L51/56
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