| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus that includes a load port on which a transfer container containing a plurality of substrates is placed, and a container store part storing the transfer container, and that is capable of increasing the number of transfer of the transfer container in the load port, thereby processing the substrate with high throughput. <P>SOLUTION: A substrate processing apparatus includes a first load port 21 in which a transfer container 10 containing a plurality of substrates is transferred along conveyance paths 102A, 102B by using conveyance devices 104A, 104B conveying the transfer container 10, and a second load port 22 provided in a stepwise manner with respect to the first load port 21. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
