发明名称 搬送システム
摘要 <p>A transfer system according to an embodiment includes a robot and a determination unit. The robot includes robot hands that hold a workpiece in a thin plate shape and that are located at different heights. The determination unit determines the robot hands that hold the workpiece based on a combination of temperature of the workpiece to be held by each of the robot hands.</p>
申请公布号 JP5609896(B2) 申请公布日期 2014.10.22
申请号 JP20120005332 申请日期 2012.01.13
申请人 发明人
分类号 H01L21/677;B25J13/00;B65G49/07 主分类号 H01L21/677
代理机构 代理人
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