发明名称 バイト、ページおよびブロックに書き込むことができ、セルアレイ中で干渉を受けず分割が良好な特性を備え、新規のデコーダ設計とレイアウトの整合ユニットと技術を使用する単体式複合型不揮発メモリ
摘要 <p>A nonvolatile memory array has a single transistor flash memory cell and a two transistor EEPROM memory cell which maybe integrated on the same substrate. The nonvolatile memory cell has a floating gate with a low coupling coefficient to permit a smaller memory cell. The floating gate placed over a tunneling insulation layer, the floating gate is aligned with edges of the source region and the drain region and having a width defined by a width of the edges of the source the drain. The floating gate and control gate have a relatively small coupling ratio of less than 50% to allow scaling of the nonvolatile memory cells. The nonvolatile memory cells are programmed with channel hot electron programming and erased with Fowler Nordheim tunneling at relatively high voltages.</p>
申请公布号 JP5612037(B2) 申请公布日期 2014.10.22
申请号 JP20120171569 申请日期 2012.08.02
申请人 发明人
分类号 H01L27/115;G11C16/04;G11C16/10;G11C16/14;H01L21/336;H01L21/8247;H01L29/788;H01L29/792 主分类号 H01L27/115
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