| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator driven optical deflector capable of effectively protecting itself from damages by absorbing vibrations and shocks without an increase in the device size and degradation in deflecting and scanning performance. <P>SOLUTION: An optical deflector A1 includes a mirror section 1 having a reflective surface, and piezoelectric actuators 8a, 8b which are connected with torsion bars 2a, 2b on one end and connected with and supported by a support body 10 on the other end. The mirror section is rotated via the torsion bars by applying a drive voltage to the piezoelectric actuators. Shock absorbers 9a, 9b provided in an air gap between the mirror section 1 and the support body 10 are formed on the support body 10 in sections that face the mirror section 1 in the direction perpendicular to the torsion bars by patterning an elastic and photo-sensitive high polymer material through photolithographic processing. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
