| 摘要 |
<p>An acceleration sensor according to the embodiment of the present invention includes a mass body part, a flexible beam which has an electrode or a piezoresistor and is combined with the mass body part, and a support part which is connected to the flexible beam, supports the flexible beam, faces the mass body part, and has a stress blocking slit. The mass body part, the flexible beam, and the support part are combined with a first substrate and a second substrate. A first masking pattern corresponding to the flexible beam, the mass body part, and the support is formed on one surface of the first substrate. A second masking pattern corresponding to the mass body part and the support part is formed on one surface of the second substrate.</p> |
