| 摘要 |
An electrostatic actuator 100 includes: a stator 1 that includes a substrate 102 and a plurality of linear electrodes 1a to 1d separately provided on the substrate 102 and arranged in parallel; and a movable element 2 disposed on the linear electrodes 1a to 1d of the stator 1. Multiple projecting elements 104b are provided at regular intervals on a surface of the stator 1 so as to face the movable element 2, forming a mat surface. A smooth layer 105 is formed on a surface of the movable element 2 so as to face the mat surface. |
