| 摘要 |
<p>Disclosed is a process for producing a glass substrate for information recording media through a polishing step in which a glass disk is polished using a slurry containing abrasive grains of cerium oxide. In the process, the abrasive grains of cerium oxide are inhibited from remaining and the main surface is inhibited from becoming rough. The process for producing a glass substrate for information recording media includes a lapping step in which a glass disk is lapped and a cerium oxide polishing step in which the glass disk is subsequently polished with abrasive grains of cerium oxide. The process further includes: subsequently to the cerium oxide polishing step, either a drying step (a) in which the glass disk is dried or a cleaning step (b) in which the glass disk is cleansed with a first cleaning fluid that contains one or more inorganic acids selected from a group consisting of sulfuric acid and nitric acid in a concentration of 55 mass% or higher and that has a temperature of 30ºC or lower; and a cleaning step (c) in which the glass disk after the step (a) or (b) is cleansed with a second cleaning fluid having a sulfuric acid concentration of 55-80 mass%, a hydrogen peroxide concentration of 1-10 mass%, and a temperature of 70ºC or higher.</p> |
