| 摘要 |
<p>There are provided an optical non-destructive inspection apparatus that can inspect a measurement object such as a wire bonding portion in a broad measurable temperature range in a short time, with high reliability, and an optical non-destructive inspection method using it. The apparatus includes a focusing-collimating unit (10), a heating laser beam source (21), a heating laser beam guide unit, a first infrared detector (35), a second infrared detector (31), an emitted-infrared selective guide unit, and a control unit (50). The control unit (50) controls the heating laser beam source (21), measures a temperature rise characteristic that is a temperature rise state of a measurement spot (SP) based on a heating time, on the basis of a ratio between a detected value from the first infrared detector (35) and a detected value from the second infrared detector (31), determines a state of a measurement object (a bonding structure (97)) based on the temperature rise characteristic, and changes at least one of wavelengths of infrared light beams guided to the first infrared detector (35) and the second infrared detector (31) based on a measured temperature during measurement.</p> |
