发明名称 フィルムの露光装置
摘要 PROBLEM TO BE SOLVED: To provide a film exposure device capable of preventing the damage and vibrations of a film during carrying and exposing, enabling continuous exposure processing during carrying, and improving productivity.SOLUTION: A film exposure device 1 comprises a pair of carrying rollers 11 carrying a film 2a on which photosensitive material is applied in a longitudinal direction thereof, a stage 10 disposed below the film 2a between the carrying rollers 11 and supporting the film, and a light source 13 irradiating the film 2a on the stage 10 with exposure light to expose. The stage 10 comprises a platy substrate 10f made from porous material, air jetting members 10a and 10d blowing air upward from a porous portion of the substrate 10f to support the film on the substrate without contacting, and an intake member sucking air from a surface of the substrate 10f through intake holes 10e provided on the substrate 10f.
申请公布号 JP5610432(B2) 申请公布日期 2014.10.22
申请号 JP20100160169 申请日期 2010.07.15
申请人 发明人
分类号 G03F7/20;B65H23/24;H01L21/027 主分类号 G03F7/20
代理机构 代理人
主权项
地址