发明名称 LARGE AREA OPTICAL QUALITY SYNTHETIC POLYCRYSTALLINE DIAMOND WINDOW
摘要 A polycrystalline chemical vapour deposited (CVD) diamond wafer comprising: a largest linear dimension equal to or greater than 70 mm; a thickness equal to or greater than 1.3 mm; and one or both of the following characteristics measured at room temperature (nominally 298 K) over at least a central area of the polycrystalline CVD diamond wafer, said central area being circular, centred on a central point of the polycrystalline CVD diamond wafer, and having a diameter of at least 70% of the largest linear dimension of the polycrystalline CVD diamond wafer: an absorption coefficient ≦̸0.2 cm−1 at 10.6 μm; and a dielectric loss coefficient at 145 GHz, of tan δ≦̸2×10−4.
申请公布号 EP2791386(A1) 申请公布日期 2014.10.22
申请号 EP20120808340 申请日期 2012.12.13
申请人 ELEMENT SIX TECHNOLOGIES LIMITED 发明人 INGLIS, PAUL NICHOLAS;BRANDON, JOHN ROBERT;DODSON, JOSEPH MICHAEL;MOLLART, TIMOTHY PETER
分类号 C23C16/01;C23C16/27;C23C16/44;C23C16/455;C23C16/458;C23C16/46;C23C16/56;H01J37/32 主分类号 C23C16/01
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