发明名称 |
LARGE AREA OPTICAL QUALITY SYNTHETIC POLYCRYSTALLINE DIAMOND WINDOW |
摘要 |
A polycrystalline chemical vapour deposited (CVD) diamond wafer comprising: a largest linear dimension equal to or greater than 70 mm; a thickness equal to or greater than 1.3 mm; and one or both of the following characteristics measured at room temperature (nominally 298 K) over at least a central area of the polycrystalline CVD diamond wafer, said central area being circular, centred on a central point of the polycrystalline CVD diamond wafer, and having a diameter of at least 70% of the largest linear dimension of the polycrystalline CVD diamond wafer: an absorption coefficient ≦̸0.2 cm−1 at 10.6 μm; and a dielectric loss coefficient at 145 GHz, of tan δ≦̸2×10−4. |
申请公布号 |
EP2791386(A1) |
申请公布日期 |
2014.10.22 |
申请号 |
EP20120808340 |
申请日期 |
2012.12.13 |
申请人 |
ELEMENT SIX TECHNOLOGIES LIMITED |
发明人 |
INGLIS, PAUL NICHOLAS;BRANDON, JOHN ROBERT;DODSON, JOSEPH MICHAEL;MOLLART, TIMOTHY PETER |
分类号 |
C23C16/01;C23C16/27;C23C16/44;C23C16/455;C23C16/458;C23C16/46;C23C16/56;H01J37/32 |
主分类号 |
C23C16/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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