发明名称 Semiconductor chip device with polymeric filler trench
摘要 A method of manufacturing is provided that includes providing a semiconductor chip with an insulating layer. The insulating layer includes a trench. A second semiconductor chip is stacked on the first semiconductor chip to leave a gap. A polymeric filler is placed in the gap wherein a portion of the polymeric filler is drawn into the trench.
申请公布号 US8866276(B2) 申请公布日期 2014.10.21
申请号 US201314132557 申请日期 2013.12.18
申请人 Advanced Micro Devices, Inc.;ATI Technologies ULC 发明人 Su Michael Z.;Refai-Ahmed Gamal;Black Bryan
分类号 H01L21/00;H01L21/56;H01L23/498;H01L25/065;H01L23/367;H01L23/31;H01L23/29;H01L23/24;H01L23/00;H01L23/495;H01L23/14 主分类号 H01L21/00
代理机构 代理人 Honeycutt Timothy M.
主权项 1. An apparatus, comprising: a first semiconductor chip; an insulating layer on the first semiconductor chip, the insulating layer including a trench, the trench having a width and a length, the width being smaller than the length, the trench defined by opposing sidewalls of the insulating layer; a second semiconductor chip stacked on the first semiconductor chip to leave a gap between the second semiconductor chip and the insulating layer; and a polymeric filler positioned in the gap wherein a portion of the polymeric filler is in the trench.
地址 Sunnyvale CA US
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