Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

摘要

A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

主权项

1. A method of manufacturing an organic light-emitting display device by using a thin film deposition apparatus, the apparatus including a loading unit to arrange a substrate, which is a deposition target, on an electrostatic chuck, a deposition unit including a thin film deposition assembly to form a thin film on the substrate, and an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck, the method comprising:
arranging the substrate on the electrostatic chuck by using the loading unit; disposing the electrostatic chuck having the substrate thereon either on a first guide block moving along a first guide rail in a first direction or on a second guide block moving along a second guide rail in the first direction; depositing a deposition material discharged from the thin film deposition apparatus on the substrate while the substrate or the thin film deposition apparatus is moved relative to the other; separating the electrostatic chuck from said either the first or second guide block by using the unloading unit; and returning said either the first or second guide block on respective said first or second guide rail in a return direction opposite to the first direction toward the loading unit, wherein the first guide block remains on the first guide rail and the second guide block remains on the second guide rail.