Semiconductor device using buried oxide layer as optical wave guides

摘要

A semiconductor optical wave guide device is described in which a buried oxide layer (BOX) is capable of guiding light. Optical signals may be transmitted from one part of the semiconductor device to another, or with a point external to the semiconductor device, via the wave guide. In one example, an optical wave guide is provided including a core insulating layer encompassed by a clad insulating layer. The semiconductor device may contain an etched hole for guiding light to and from the core insulating layer from a transmitter or to a receiver.

主权项

1. A method, comprising:
obtaining a semiconductor device having a first layer and a second layer, wherein the second layer is disposed on the first layer; forming a third layer on and in direct physical contact with the second layer, wherein the third layer has a same index of refraction as the first layer and a different index of refraction than the second layer; forming a first silicon layer on the third layer; forming an opening extending through the first silicon layer and the third layer; forming a transistor in and on the first silicon layer; and forming one of a light transmitter and a light receiver optically coupled to the second layer via the opening, wherein the second layer is light transmissive, the semiconductor device is manufactured such that light that is transmitted through the opening contacts the second layer at a first angle and is refracted into the second layer at a second angle, and the second angle is in a range of about 20.364 degrees to about 28.955 degrees.