Method of manufacturing solar cell

摘要

A solar cell is manufactured, which includes: a solar cell substrate including a semiconductor substrate, a p-type surface and an n-type surface exposed on a first principal surface, and a texture structure in a second principal surface; a p-side electrode disposed on the p-type surface; an n-side electrode disposed on the n-type surface; and an insulation layer formed on the first principal surface and isolating the p-side electrode and the n-side electrode from each other. The manufacturing method of the solar cell includes: forming an insulation film covering the first principal surface; forming the texture structure in the second principal surface; and removing part of the insulation film, thereby forming the insulation layer.

主权项

1. A method to manufacture a solar cell including: a solar cell substrate including a semiconductor substrate, a first principal surface with a p-type surface and an n-type surface, and a textured second principal surface; a p-side electrode disposed on the p-type surface; an n-side electrode disposed on the n-type surface; and an insulation layer formed on the first principal surface and isolating the p-side electrode and the n-side electrode from each other, the method comprising:
forming a first semiconductor layer of a first conductivity on the first principal surface of the semiconductor substrate; forming an insulation film on the first semiconductor layer; forming the texture structure in the second principal surface; partly removing the insulation film and the first semiconductor layer to thereby expose part of the first principal surface; and forming a second semiconductor layer of a second conductivity to cover the insulation layer and the exposed part of the first principal surface, thereby obtaining the solar cell substrate including the semiconductor substrate, the first semiconductor layer, and the second semiconductor layer.