Photoelectric conversion device and manufacturing method thereof

摘要

A photoelectric conversion device is provided which is capable of improving the light condensation efficiency without substantially decreasing the sensitivity. The photoelectric conversion device has a first pattern provided above an element isolation region formed between adjacent two photoelectric conversion elements, a second pattern provided above the element isolation region and above the first pattern, and microlenses provided above the photoelectric conversion elements with the first and the second patterns provided therebetween. The photoelectric conversion device further has convex-shaped interlayer lenses in optical paths between the photoelectric conversion elements and the microlenses, the peak of each convex shape projecting in the direction from the electro-optical element to the microlens.

主权项

1. A photoelectric conversion device having an effective pixel region and an optical black region outside of the effective pixel region, the device comprising:
a photoelectric conversion element layer having a first photoelectric conversion element in the effective pixel region and a second photoelectric conversion element in the optical black region; a first wire layer provided above the photoelectric conversion element layer, provided in the effective pixel region and the optical black region, and having a first wire pattern; a second wire layer provided above the first wire layer, provided in the effective pixel region and the optical black region, and having a second wire pattern; a first insulating film provided between the first wire layer and the second wiring layer; a second insulating film provided above the second wire layer and having a thickness thinner than that of the first insulating film; a light shielding member provided above the second photoelectric conversion element in the optical black region, and not provided above the first photoelectric conversion element in the effective pixel region; an interlayer lens layer provided above the second insulating film and extended to the optical black region from the effective pixel region; and a microlens layer provided above the interlayer lens layer and extended to the optical black region from the effective pixel region.