发明名称 Semiconductor structure and fabrication method thereof
摘要 A semiconductor structure includes a semiconductor chip having at least an electrode pad, a first metal layer formed on the electrode pad, a second metal layer completely formed on and in contact with the first metal layer, and a conductive pillar disposed on the second metal layer, where a material of the first metal layer is different from a material of the second metal layer, the first metal layer has a first distribution-projected area larger than a second distribution projected-area of the conductive pillar, and the second metal layer has a third distribution-projected area that is the same as the second distribution-projected area of the conductive pillar.
申请公布号 US8866293(B2) 申请公布日期 2014.10.21
申请号 US201113167086 申请日期 2011.06.23
申请人 Siliconware Precision Industries Co., Ltd. 发明人 Lin Yi-Hung;Lee Meng-Tsung;Kao Sui-An;Chen Yi-Hsin;Chien Feng-Lung
分类号 H01L23/48;H01L23/00;H01L23/31 主分类号 H01L23/48
代理机构 Edwards Wildman Palmer LLP 代理人 Edwards Wildman Palmer LLP ;Corless Peter F.;Jensen Steven M.
主权项 1. A semiconductor structure, comprising: a chip having at least an electrode pad; a first metal layer formed on the electrode pad; a second metal layer completely formed on and in contact with the first metal layer, the first metal layer being different in material from the second metal layer; and a conductive pillar disposed on the second metal layer, wherein the first metal layer has a first distribution-projected area larger than a second distribution-projected area of the conductive pillar, and the second metal layer has a third distribution-projected area that is the same as the second distribution-projected area of the conductive pillar, such that a top surface of the first metal layer is exposed from the conductive pillar and the second metal layer.
地址 Taichung TW