发明名称 |
Semiconductor structure and fabrication method thereof |
摘要 |
A semiconductor structure includes a semiconductor chip having at least an electrode pad, a first metal layer formed on the electrode pad, a second metal layer completely formed on and in contact with the first metal layer, and a conductive pillar disposed on the second metal layer, where a material of the first metal layer is different from a material of the second metal layer, the first metal layer has a first distribution-projected area larger than a second distribution projected-area of the conductive pillar, and the second metal layer has a third distribution-projected area that is the same as the second distribution-projected area of the conductive pillar. |
申请公布号 |
US8866293(B2) |
申请公布日期 |
2014.10.21 |
申请号 |
US201113167086 |
申请日期 |
2011.06.23 |
申请人 |
Siliconware Precision Industries Co., Ltd. |
发明人 |
Lin Yi-Hung;Lee Meng-Tsung;Kao Sui-An;Chen Yi-Hsin;Chien Feng-Lung |
分类号 |
H01L23/48;H01L23/00;H01L23/31 |
主分类号 |
H01L23/48 |
代理机构 |
Edwards Wildman Palmer LLP |
代理人 |
Edwards Wildman Palmer LLP ;Corless Peter F.;Jensen Steven M. |
主权项 |
1. A semiconductor structure, comprising:
a chip having at least an electrode pad; a first metal layer formed on the electrode pad; a second metal layer completely formed on and in contact with the first metal layer, the first metal layer being different in material from the second metal layer; and a conductive pillar disposed on the second metal layer, wherein the first metal layer has a first distribution-projected area larger than a second distribution-projected area of the conductive pillar, and the second metal layer has a third distribution-projected area that is the same as the second distribution-projected area of the conductive pillar, such that a top surface of the first metal layer is exposed from the conductive pillar and the second metal layer. |
地址 |
Taichung TW |