Fluid ejection using MEMS composite transducer

摘要

A method of ejecting a drop of fluid includes providing a fluid ejector. The fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. The substrate includes a cavity and a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member, A second portion of the compliant membrane being anchored to the substrate. Walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. A quantity of fluid is supplied to the chamber through the fluidic feed. An electrical pulse is applied to the MEMS transducing member to eject a drop of fluid through the nozzle.

主权项

1. A method of ejecting a drop of fluid, the method comprising:
providing a fluid ejector including:
a substrate including a cavity and a fluidic feed;a MEMS transducing member, a first portion of the MEMS transducing member being anchored to the substrate, a second portion of the MEMS transducing member extending over at least a portion of the cavity, the second portion of the MEMS transducing member being free to move relative to the cavity;a compliant membrane positioned in contact with the MEMS transducing member, a first portion of the compliant membrane covering the MEMS transducing member, and a second portion of the compliant membrane being anchored to the substrate, wherein the compliant membrane extends over the cavity but does not extend over the fluidic feed;partitioning walls defining a chamber that is fluidically connected to the fluidic feed, wherein at least the second portion of the MEMS transducing member is enclosed within the chamber; anda nozzle; supplying a quantity of fluid to the chamber through the fluidic feed; and applying an electrical pulse to the MEMS transducing member to eject a drop of fluid through the nozzle.