| 摘要 |
<p>A delamination apparatus includes: a stage mounted with a lower supporting member, an acceptor substrate positioned on the lower supporting member, and a donor film laminated with the lower supporting member along the edge of the acceptor substrate; a first gripper positioned at an end side of the stage to grip the end of the donor film, and configured to move in a direction away from the acceptor substrate; and a first peeling roll positioned on the donor film to blow ions to the donor film positioned between the acceptor substrate and the first gripper, and rotated itself in a direction of the first gripper.</p> |
