SENSOR FOR MEASURING PRESSURE AND TEMPERATURE AND SENSING SYSTEM INCLUDING THE SAME

摘要

The present invention relates to a temperature sensor in a new method where RF characteristics change by pressure and temperature, and a sensing system including the same. The sensor comprises: a substrate which includes a cavity whose volume changes depending on the outside pressure and temperature; and a metal conductor which is formed on the top surface of the substrate and whose RF characteristics is varied by the volume of the cavity.