| 摘要 |
PURPOSE: A humidity control method of a direct spray style vaporization humidification apparatus in a clean room is provided to directly vaporize steam in the clean room so as to supply a required amount of deionized water. CONSTITUTION: A humidity control method using a vaporization humidification apparatus is as follows. A temperature and humidity sensor installed in a clean room senses the humidity and temperature of the inside of the clean room. The sensed humidity and temperature are transmitted to a control valve controller. When the sensed humidity is lower than predetermined humidity, the control valve controller opens a valve provided to a compressed air pipe(71) of a compressed air generator(70). A nozzle on a manifold(40) sprays deionized water in an ultrafine particle state to the clean room according to the compressed air. The deionized water in the ultrafine particle state is sprayed and evaporated simultaneously to absorb evaporated latent heat in the clean room so as to reduce the internal temperature of the clean room. When the internal humidity of the clean room becomes close to a target humidity, the temperature and humidity sensor switches off the valve to interrupt spraying of deionized water. |
