PROCEDE POUR LA MESURE DE POTENTIELS DE SURFACE SUR DES DISPOSITIFS POLARISES

摘要

The present invention concerns a method for measuring the surface potential of a polarised sample (2), comprising the following steps: - measuring the topographic profile (11) of the sample (2) by scanning its surface with a tapered tip (3) connected to a micro-lever (4) activated at the resonance frequency of same by a piezoelectric actuator (5); - placing said tapered tip (3) a constant distance (d) away from the topographic profile (11) of the surface obtained during the previous step; - measuring the electrostatic potential (13) of said surface; said method being characterised in that said sample (2) is not polarised during the step of measuring the topographic profile (11) and in that said sample (2) is polarised during the measurement of the potential profile (13).