发明名称 PRODUCTION METHOD FOR POLYMER, AND PRODUCTION METHOD FOR RESIST COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a production method for a polymer which can exhibit performances as designed for an intended purpose, and to provide a production method for a resist composition which can exhibit performances as designed in a resist film and can suppress generation of defects in a resist pattern.SOLUTION: A production method for a polymer includes a step of dropping a monomer solution reserved in a preparation tank 10 (vessel), the solution comprising a monomer component and a polymerization initiator, into a solvent held at a polymerization temperature in a polymerization tank 20 so as to polymerize the monomer component. The monomer solution in the preparation tank 10 is maintained at 10 to 35°C; a fluctuation range of the temperature in the monomer solution at an exit of a supply pipe 16 is maintained to 6°C or lower by adjusting the temperature of the monomer solution in the supply pipe 16 for supplying the monomer solution in the preparation tank 10 to the polymerization tank 20; and a fluctuation range of the polymerization temperature is maintained to 4°C or lower.
申请公布号 JP2014196512(A) 申请公布日期 2014.10.16
申请号 JP20140144447 申请日期 2014.07.14
申请人 MITSUBISHI RAYON CO LTD 发明人 INABA HIDEYUKI;MIHASHI TAKASHI
分类号 C08F2/04 主分类号 C08F2/04
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