APPARATUS AND METHOD FOR ANNULAR OPTICAL POWER MANAGEMENT

摘要

A system and method for obtaining super-resolution image of an object. An illumination beam is directed through an optical axis onto the object to be imaged. Paraxial rays of the illumination beam are deflected away from the optical axis and into a beam dump. The non-paraxial rays are collected after being reflected by the object so as to generate an image only from the non-paraxial rays.

主权项

1. A system for super-resolution imaging of an object, comprising:
an illumination source providing an illumination beam; an objective lens focusing the illumination beam onto the object and collecting the illumination beam after it has reflected from the object; deflection optics positioned in optical path of the system and deflecting central part of the illumination beam away from the optical path; and, a sensor positioned to receive only remaining part of the illumination beam which was not deflected from the optical path of the system.