| 摘要 |
An object is to provide a method of manufacturing a water repellent film, a nozzle plate, an inkjet head, and an inkjet recording device which are able to improve dynamic water repellency of a water repellent film which includes a straight-chain fluorine-based organic material. The method of manufacturing a water repellent film includes forming a first organic film on a silicon substrate with a silicon compound which does not include a fluorine atom as a raw material, forming an inorganic oxide film on the first organic film, and forming a second organic film on the inorganic oxide film with a straight-chain fluorine-containing silane coupling agent as a raw material. |
| 主权项 |
1. A method of manufacturing a water repellent film comprising:
forming a first organic film on a silicon substrate by using a silicon compound represented by X3-nR2nSi—R1—Z (n=0, 1, 2) which does not include a fluorine atom or a silicon compound represented by HN(SiR3R4R5)2, as a raw material; forming an inorganic oxide film on the first organic film; and forming a second organic film on the inorganic oxide film by using a straight-chain fluorine-containing silane coupling agent as a raw material: wherein, X in the formula is any of a halogen (except fluorine), a methoxy group, an ethoxy group, an acetoxy group, or a 2-methoxyethoxy group, R2 is an alkyl group which has 1 to 3 carbon atoms, R1 is CmH2m wherein m is a natural number of 1 to 20, Z is a group which contains any of a methyl group, a vinyl group, an amino group, an epoxy group, a methacrylic group, an acrylic group, a mercapto group, an isocyanate group, an acylthio group, or a ureido group, and R3, R4, and R5 are alkyl groups which have 1 to 3 carbon atoms. |
