| 发明名称 |
MEMS Inertial Sensor and Method of Inertial Sensing |
| 摘要 |
The invention comprises an inertial sensor comprising a frame, a proof mass, a first resonant element, the first resonant element being fixed to the frame and electrostatically coupled to the proof mass, and a second resonant element, the second resonant element being fixed to the frame, adjacent to the first resonant element such that there is substantially no electrostatic coupling between the second resonant element and the proof mass. A coupling is provided between the first resonant element and the second resonant element. A drive means is coupled to the first and second resonant elements for vibrating the first and second resonant elements and a sensor assembly is provided for detecting the amplitude of vibration of at least one of the resonant elements. |
| 申请公布号 |
US2014305208(A1) |
申请公布日期 |
2014.10.16 |
| 申请号 |
US201214360182 |
申请日期 |
2012.11.22 |
| 申请人 |
Cambridge Enterprise Limited |
发明人 |
Thiruvenkatanathan Pradyumna;Seshia Ashwin |
| 分类号 |
G01C19/5712 |
主分类号 |
G01C19/5712 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An inertial sensor comprising:
a frame; a proof mass; a first resonant element, the first resonant element being fixed to the frame and electrostatically coupled to the proof mass; a second resonant element, the second resonant element being fixed to the frame, adjacent to the first resonant element such that there is substantially no electrostatic coupling between the second resonant element and the proof mass; a coupling between the first resonant element and the second resonant element; a drive means coupled to the first and second resonant elements for vibrating the first and second resonant elements; and a sensor assembly for detecting the amplitude of vibration of at least one of the resonant elements. |
| 地址 |
Cambridge, Cambridgeshire GB |
