发明名称 |
STRUCTURE REPLICATION METHOD, LOCALIZED SURFACE PLASMON RESONANCE SENSOR CHIP MANUFACTURING METHOD INCLUDING THIS REPLICATION METHOD, STRUCTURE, LOCALIZED SURFACE PLASMON RESONANCE SENSOR CHIP, AND LOCALIZED SURFACE PLASMON RESONANCE SENSOR |
摘要 |
<p>In order to easily replicate a structure, by which a high-sensitivity localized surface plasmon resonance sensor can be provided, by a nanoimprint method, this replication method comprises: (i) a step for performing mold release treatment on a first structure; (ii) a step for manufacturing a second structure that becomes a mold for the first structure; and (iii) a step for pressing the second structure against resin to manufacture a third structure that is a replica of the first structure.</p> |
申请公布号 |
WO2014168237(A1) |
申请公布日期 |
2014.10.16 |
申请号 |
WO2014JP60481 |
申请日期 |
2014.04.11 |
申请人 |
KANEKA CORPORATION |
发明人 |
SEZAKI, FUMIYASU;KANEZAKI, YUSUKE |
分类号 |
G01N21/41;B29C59/02;G01N21/01;G01N33/543;H01L21/027 |
主分类号 |
G01N21/41 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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