发明名称 STRUCTURE REPLICATION METHOD, LOCALIZED SURFACE PLASMON RESONANCE SENSOR CHIP MANUFACTURING METHOD INCLUDING THIS REPLICATION METHOD, STRUCTURE, LOCALIZED SURFACE PLASMON RESONANCE SENSOR CHIP, AND LOCALIZED SURFACE PLASMON RESONANCE SENSOR
摘要 <p>In order to easily replicate a structure, by which a high-sensitivity localized surface plasmon resonance sensor can be provided, by a nanoimprint method, this replication method comprises: (i) a step for performing mold release treatment on a first structure; (ii) a step for manufacturing a second structure that becomes a mold for the first structure; and (iii) a step for pressing the second structure against resin to manufacture a third structure that is a replica of the first structure.</p>
申请公布号 WO2014168237(A1) 申请公布日期 2014.10.16
申请号 WO2014JP60481 申请日期 2014.04.11
申请人 KANEKA CORPORATION 发明人 SEZAKI, FUMIYASU;KANEZAKI, YUSUKE
分类号 G01N21/41;B29C59/02;G01N21/01;G01N33/543;H01L21/027 主分类号 G01N21/41
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