| 摘要 |
The present invention relates to a substrate detection unit and, more specifically, to a substrate detection unit to detect a substrate in a noncontact fashion. To achieve this, the present invention provides a substrate detection unit which includes: a light emitting unit for irradiating light; a light receiving unit to receive light reflected by a substrate after the light is irradiated by the light emitting unit; and an air ejection nozzle to eject air onto the light emitting unit and the light receiving unit to form an air curtain. |
