| 摘要 |
<p>A device for inspecting display cells comprises; an inspection chamber in which an inspection process for a plurality of display cells formed on a substrate are performed; a substrate stage which is arranged inside the inspection chamber and supports the substrate so that the display cells face to the lower side; a card stage which is placed under the substrate stage for supporting a probe card which is formed to be in contact with the display cells to inspect the display cells; and a leveling unit which controls the horizontality of the probe card. Therefore, probes of the probe card uniformly come in contact with the display cells, thereby an error by a contact failure in the inspection process of the display cells can be reduced enough.</p> |
