LIQUID SUPPLY DEVICE AND LIQUID SUPPLY KNIFE

摘要

PROBLEM TO BE SOLVED: To provide a liquid supply device which uniformly supplies a fluid to a substrate.SOLUTION: A liquid supply device comprises: a first knife member 16 where one side surface is formed into a flat first joint surface 16a, the first knife member 16 having a hollow shape including a space part 18 to which a fluid is supplied; a second knife member 17 where one side surface is formed into a flat second joint surface 17a, the second knife member 17 being connected with the first knife member by joining the second joint surface to the first joint surface; a slit 25 which is formed between the joint surfaces of the first knife member and the second knife member opening to lower ends of the joint surfaces; and a chamber 23 and an outflow hole 24 which adjust a pressure of the fluid supplied to the space part of the first knife member so as to be uniform in a longitudinal direction of the slit and flow out the fluid from the slit.