| 摘要 |
<p>PROBLEM TO BE SOLVED: To shorten time required to install a substrate processor in a factory.SOLUTION: A substrate processor 1 comprises: a plurality of first downstream exhaust pipes 28, connected to corresponding exhaust switching devices 27, into which exhaust expelled from the exhaust switching devices 27 flows; and a plurality of second downstream exhaust pipes 29, connected to the corresponding exhaust switching devices 27, into which exhaust expelled from the exhaust switching devices 27 flows. The substrate processor 1 further comprises: a first group of exhaust pipes 38 connected to the corresponding first downstream exhaust pipes 28 and configured to guide exhaust expelled from the first downstream exhaust pipes 28 to a first exhaust processing facility 41 provided in a factory where the substrate processor 1 is installed; and a second group of exhaust pipes 39 connected to the corresponding second downstream exhaust pipes 29 and configured to guide exhaust expelled from the second downstream exhaust pipes 29 to a second exhaust processing facility 42 provided in the factory where the substrate processor 1 is installed.</p> |
