| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an oscillating mirror device which satisfies both of a requirement for preventing distortion of an oscillating mirror element and a reinforcement plate and a requirement for securing positional accuracy of the oscillating mirror element.SOLUTION: MEMS mirror devices 2a and 2b of the present invention include: MEMS mirror elements 23a and 23b respectively comprising a mirror unit 24 having a reflective surface for reflecting laser light and a mirror support unit 25 which rotatably supports the mirror unit 24 and has terminals 25d formed on a front surface 25a thereof on a side of the reflective surface of the mirror unit 24; and a reinforcement plate 27 bonded to a back surface 25c of the mirror support unit 25 on a side opposite the side of the reflective surface of the mirror unit 24 via die-bonding materials. The die-bonding materials include a hard die-bonding material 3a provided at a location corresponding to the mirror unit 24 and a soft die-bonding material 3b provided at locations corresponding to the terminals 25d.</p> |
