| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a force detection device capable of suppressing a measurement error due to thermal expansion, robot, an electronic component transport device, an electronic component inspection device, a component processing device, and a moving body.SOLUTION: A force detection device includes: a first substrate 2; a second substrate 3 arranged opposite the first substrate; an intermediate part 6 provided between the first substrate and second substrate; an element 10 provided between the intermediate part 6 and second substrate 3, and outputting a signal corresponding to external force; fixing members 71, 72 fixing the first substrate 2 and second substrate 3; a first heat insulation member 82 provided between the first substrate 2 and intermediate part 6 and having heat insulation properties; and a second heat insulation member 83 provided between the second substrate 3 and element 6 and having heat insulation properties.</p> |
