| 摘要 |
The invention relates to a gas distributor in which gases can be transported, comprising at least two segments that are interconnected in a gas-tight manner by means of easily detachable securing means, and at least one gas inlet opening and at least one gas outlet opening, said gas distributor being able to be mounted, by means of easily detachable securing means, on a base plate of a reactor for polycrystalline silicon deposition, said at least one gas outlet opening of the gas distributor being connected so as to be in communication with a gas inlet opening of the reactor, and/or the at least one gas inlet opening of the gas distributor being connected so as to be in communication with a gas outlet opening of said reactor. |
