| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoelectric encoder capable of maintaining accuracy of a light reception signal.SOLUTION: A photoelectric encoder includes; a scale (11) having a grid-like scale mark portion (111); a detection head unit (2) having a light source fiber (21) which irradiates the scale (11) with coherent light and light-receiving fibers (22) for receiving reflection light from the scale (11); an electrical unit (6) which is connected to the detection head unit (2) via the light source fiber (21) and the light-receiving fibers (22); and a protection unit (13) which is located at a predetermined distance from the scale mark portion (111) to cover the scale mark portion (111). The protection unit (13) is made of a light transmissive material and has an upper surface (131) which is tilted relative to a main surface (112) of the scale (11). |
